Abstract: The dynamic and static properties of piezoelectric ceramic microactuators are introduced, and the measuring method and systems are also described. The properties of microactuators made from two different kinds of piezoelectric ceramic materials antipiezoelectric and electrostrictive effects are experimentally researched. The Linearity of antipiezoelectric kind is 0. 11%, the repeatability is ±0. 01μm, and the voltage-displacement sensitivity is about 1μm/100V. In low frequency band below 200Hz, the amplitude-frequency curve is straight, the phase-frequency curve is linear and the phase lag is less than 25 degrees. The voltage-displacement property of electrostrictive kind is nonlinear and the displacement is relatively large; When input voltage is 500V, the output displacement is about 12μm. The experiment results show that the first kind of microactuator can be used in precision linear controls, and the electrostrictive kind is more suitable for a larger displacement situation.

Key words: piezoelectric ceramics, displacement measurement, characteristics