Abstract:

In order to reduce the influence of microfabrication error on the design performance of a tuning fork vibratory micromachined gyroscope, and to enhance the performance robustness in the volume production environment, the limited key parameters with great influence on the fabricated performance stability are taken as the design variables at first, and then the constraint conditions of dimension, modal performance and modebased microfabrication sensitivity are profoundly analyzed, and the mathematical model of the robust optimization of micromachined gyroscope is correspondingly established.

Key words: micromachined , gyroscope,  , robust , optimization,  , microfabrication , error,  , natural , frequency,  , mathematical , model