检测质量对硅微机械框架振动陀螺影响的研究

ACTA AERONAUTICAET ASTRONAUTICA SINICA ›› 1997, Vol. 18 ›› Issue (4): 489-492.

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STUDY ON THE IMPACT OF PROOF MASS ON SILICON MICROMECHANICAL GIMBAL VIBRATING GYROSCOPE

Ruan Aiwu¹, Guo Xiuzhong²

1. Automatic Control Department, Northwestern Polytechnical University, Xi′an, 7100722. Faculty 304, Nanjing University of Aeronautics & Astronautics , Nanjing, 210016

Received:1996-07-19 Revised:1996-11-20 Online:1997-08-25 Published:1997-08-25

Abstract

Abstract:

The impact proof mass on the gyros performance is discussed on the basis of microgyro dynamic equation and several important parameters in the design of micromechanical vibrating gyros, including equivalent moment of inertia constraint conditions in the inner and outer gimbals, sensitivity, etc . This study will lay foundation for the gyros design in the near future.

Key words: micromechanical gimbal vibrating gyroscope, proof mass, sensitivity, equivalent moment of inertia constraint conditions

CLC Number:

V241.6

Ruan Aiwu;Guo Xiuzhong. STUDY ON THE IMPACT OF PROOF MASS ON SILICON MICROMECHANICAL GIMBAL VIBRATING GYROSCOPE[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 1997, 18(4): 489-492.

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STUDY ON THE IMPACT OF PROOF MASS ON SILICON MICROMECHANICAL GIMBAL VIBRATING GYROSCOPE

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