考虑伴生转动的大行程柔性微定位平台

doi:10.7527/S1000-6893.2021.25498

Abstract

Abstract: In order to investigate the influence of parasitic rotation on the positioning precision of large-stroke compliant micro-positioning stage, a novel 5-PPPR compliant micro-positioning stage with motion decoupling and low parasitic rotation is designed based on a novel compliant kinematic joint firstly. Secondly, based on matrix method, linear elastic beam deformation theory and the Lagrange's equation, theoretical analysis of both static and dynamic characteristics of the stage are carried out, respectively. Meanwhile, parasitic rotation angles of the kinematic joint and micro-positioning stage are modeled in theory. Furthermore, the relationship between the input and output displacements of the stage is explored by taking the parasitic rotation into consideration. Then, the theoretical models are verified by finite element analysis, the results show that the maximum relative errors of the theoretical and simulated values of the input stiffness, parasitic rotation angle, and natural frequency are 2.20%, 1.23%, and 1.98%, respectively. And the theoretical error of the output displacement along x-axis is reduced by 94.63% with the parasitic rotation considered. Finally, the sensitivity analysis and parameter optimization are carried out, the results show that the parasitic rotation angle and lost motion of the optimized stage are reduced by 28.8% and 21.5% respectively under the same driving displacement, which further improves the positioning precision of the stage.

Key words: compliant micro-positioning stage, parasitic rotation, positioning precision, finite element analysis, parameter optimizationhttp

CLC Number:

V414
TH112

CAO Yi, MENG Gang, JU Yongjian, XU Weisheng. Large-stroke compliant micro-positioning stage considering parasitic rotation[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2022, 43(7): 425498.

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Large-stroke compliant micro-positioning stage considering parasitic rotation

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