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CJA
Large-stroke compliant micro-positioning stage considering parasitic rotation
CAO Yi, MENG Gang, JU Yongjian, XU Weisheng
ACTA AERONAUTICAET ASTRONAUTICA SINICA . 2022, (
7
): 425498 -425498 . DOI: 10.7527/S1000-6893.2021.25498