航空学报 > 2015, Vol. 36 Issue (11): 3734-3741   doi: 10.7527/S1000-6893.2015.0043

CrON扩散阻挡层对NbCrAl涂层与Nb基高温合金元素互扩散的影响

许安, 周敏, 杨阳, 秦泽华, 李伟洲   

  1. 广西大学材料科学与工程学院, 南宁 530004
  • 收稿日期:2014-10-27 修回日期:2015-02-06 出版日期:2015-11-15 发布日期:2015-02-11
  • 通讯作者: 李伟洲,Tel.:0771-3270152,E-mail:liwz2008@hotmail.com E-mail:liwz2008@hotmail.com
  • 作者简介:许安,男,硕士研究生。主要研究方向:材料表面处理与防护。E-mail:xuangx123@163.com;李伟洲,男,博士,研究员,博士生导师。主要研究方向:材料表面处理与防护。Tel:0771-3270152,E-mail:liwz2008@hotmail.com
  • 基金资助:

    国家自然科学基金(51371059,51361003,51001032);广西自然科学基金(2014GXNSFCA118013,0731013);广西高等学校高水平创新团队项目(第二批);广西自然科学基金创新研究团队项目(2011GXNSFF018001)

Influence of CrON diffusion barrier on elements inter-diffusion between NbCrAl coating and Nb-based superalloy

XU An, ZHOU Min, YANG Yang, QIN Zehua, LI Weizhou   

  1. School of Materials Science and Engineering, Guangxi University, Nanning 530004, China
  • Received:2014-10-27 Revised:2015-02-06 Online:2015-11-15 Published:2015-02-11
  • Supported by:

    National Natural Science Foundation of China (51371059,51361003,51001032);Guangxi National Natural Science Foundation (2014GXNSFCA118013,0731013);High Level Innovation Teams from Universities of Guangxi (the Second Batch);Guangxi National Natural Science Fund for Innovative Research Team (2011GXNSFF018001)

摘要:

利用磁控溅射技术在C103型Nb基高温合金上制备了含和不含CrON扩散阻挡层的NbCrAl涂层,对比研究了2种涂层分别经900℃和1000℃真空热处理后的元素扩散行为。结果表明:NbCrAl涂层以Cr2Nb和AlNb2相为主,含非晶态组织;真空热处理后生成了NbAl3和(Nb,Cr)沉淀相。热处理温度由900℃升至1000℃时,NbCrAl涂层中元素扩散速度加快。不含扩散阻挡层样品中Cr和Al元素扩散至基体的含量分别为2.76wt%和1.21wt%,而含扩散阻挡层样品中Cr和Al元素扩散到基体的含量分别仅为2.52wt%和0.84wt%。扩散阻挡层保持连续,且与涂层及基体的界面结合良好,经高温处理后主要以密排六方结构的Cr2O3和Al2O3相为主,有效地抑制了元素互扩散。

关键词: 磁控溅射技术, 涂层, Nb基合金, 扩散阻挡层, 互扩散

Abstract:

NbCrAl coatings with and without CrON diffusion barrier (DB) are prepared on C103 Nb-based superalloy by magnetron sputtering technique. The element diffusion behavior of two kinds of the coatings during vacuum heat treatment at 900℃ and 1000℃ is investigated. The results indicate that the as-deposited NbCrAl coating is composed of Cr2Nb and AlNb2 with amorphous phases. After vacuum heat treatment, NbAl3 and (Nb,Cr) precipitated phases are formed. When the heat treatment temperature is increased to 1000℃ from 900℃, the rate of diffusion of elements in the NbCrAl coating becomes accelerated. Cr and Al elements in the samples without a DB diffuse to C103 substrate are 2.76wt% and 1.21wt%, while in the samples with a DB are only 2.52wt% and 0.84wt%. CrON diffusion barrier maintains continuous and has good adhesion to the coating and substrate as well. During high-temperature treatment, the CrON diffusion barrier, which is mainly composed of Cr2O3 and Al2O3 phases with close-packed hexagonal structure phases, effectively suppresses the elements inter-diffusion between the coating and substrate.

Key words: magnetron sputtering, coating, Nb-based superalloy, diffusion barrier, inter-diffusion

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