Abstract:

First according to the matching of driving mode frequency and detection mode frequency, the structure dimensions of the comb gimbal micromachined gyroscope are optimized using a finite element method (FEM). Then an equivalent circuit model of gyroscope's oscillating properties is derived, which is available in detection oscillating properties analysis and also enables the sensor simulation with the interfacing electronics.

Key words: micromachined gyroscope, optimum design, equivalent circuit model, simulation