航空学报 > 1994, Vol. 15 Issue (11): 1399-1402

碳/碳复合材料表面沉积SiC的形态和成分

乔生儒, 骆蓉, 杨峥   

  1. 西北工业大学401教研室,西安,710072
  • 收稿日期:1993-04-19 修回日期:1993-12-15 出版日期:1994-11-25 发布日期:1994-11-25

MORPHOLOGY AND INGREDIENT OF SiC COATING ONC /CCOMPOSITES

Qiao Shengru, Luo Rong, Yang Zheng   

  1. Faculty 40l of Northwestern Polytechnical University,Xi’an,710072
  • Received:1993-04-19 Revised:1993-12-15 Online:1994-11-25 Published:1994-11-25

摘要: 在PAN碳布和沥青基体碳的C/C复合材料表面涂复了SiC。用CH4和N,为载气的SiCl4作原料,用H2为稀释气,在两种气体混合比和三种温度下化学气相沉积SiC涂层。分析表明,涂层的主要元素有C,Si、Cl和微量Ca。电镜观察表明,涂层中C原子含量为62%时呈菜花状或云团状,而当C/Si比接近于1时,表面呈菠萝状。

关键词: 碳化硅, 涂层, 碳-碳复合材料, 成分, 形态学

Abstract: SiC was coated on the surfaee of Carbon-Carbon composites prepared from the PAN carbon-cloth and pitch. CH4 and SiCl4 are used as raw material,N,as carrying gas for SiCl4 and H2 as dilution gas.CVD SiC coating is prepared with two kinds of ratio and three kinds of temperature.The main elements of coating are C, Si, Cl and traeed Ca from electronic probe,SEM observation revealed that, when the C content is 62%,the mornhology of SIC ap-pearance is cauliflower o:in cloud mass with poor oxidation resistance,and while C / Si ratio tends to l,the surfaee morphology is pineapple with increased oxidation resistanee. In addition,when the deposited temperature increases,the size of surfaee pellet becomes larger.

Key words: silicon carbides, coatings, carbon-carbon composites, composition, morphology

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