关键词: TiN, 薄膜, 化学气相沉积, 硬度, 耐磨性能

Abstract: In order to improve the wear-resistance of K3Ni-based super alloy, TiN coating is deposited by chemical vapor deposition (CVD) method at different temperatures and deposite times. The reactant gas is TiCl4/NH3. Results show that the wear resistance of the alloys deposited with TiN is greatly improved compared with those alloy without TiN films. At a set deposition temperature, the wear resistance of TiN coatings becomes better at first and then decreases with increasing deposition time. With the same deposition time, the wear resistance becomes better and better with the increasing of temperature .The best deposition condition is obtained at 600 ℃/60 min.

Key words: TiN, film, chemical vapor deposition, hardness, wear resistance