Abstract: A process used to prepare ITO transparent conducting films on inorganic glass substrates by d.c. reactive magnetron sputtering is presented. The resistivity,visible light transmittance,reflectivity and transmittance to perpendicularly incidenting microwaves of the film have been measured.The effects of O 2 concentration during reactive sputtering and annealing atmosphere after sputtering on resistivity and visible light transmittance,and the effect of square resistance on reflectivity and transmittance of microwaves have been studied.

Key words: ITO, films, sputtering, electrical resistivity, transmissivity, reflectance