柔性热电薄膜器件的研究进展

doi:10.7527/S1000-6893.2014.0152

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柔性热电薄膜器件的研究进展

邓元, 张义政, 王瑶, 高洪利

北京航空航天大学材料科学与工程学院, 北京 100191

收稿日期:2014-04-16 修回日期:2014-07-08 出版日期:2014-10-25 发布日期:2014-07-12
通讯作者: 邓元，Tel.：010-82313482 E-mail：dengyuan@buaa.edu.cn E-mail:dengyuan@buaa.edu.cn
作者简介:邓元男，教授，博士生导师。主要研究方向：新型能源转化、新型温度传感器技术、存储材料及器件设计与加工、新型有机-无机纳米复合材料的制备及应用等。 Tel：010-82313482 E-mail：dengyuan@buaa.edu.cn
基金资助:
国家自然科学基金（51172008）

Research Progress on the Flexible Thin-film Thermoelectric Devices

DENG Yuan, ZHANG Yizheng, WANG Yao, GAO Hongli

School of Materials Science and Engineering, Beihang University, Beijing 100191, China

Received:2014-04-16 Revised:2014-07-08 Online:2014-10-25 Published:2014-07-12
Supported by:
National Natural Science Foundation of China (51172008)

摘要/Abstract

摘要：

针对柔性热电薄膜器件的最新研究进展，从柔性基底、热电材料、薄膜沉积工艺、过渡层的引入和器件设计等几个方面归纳总结了在热电器件制作过程中材料和工艺选择方面应注意的问题。对各类柔性热电薄膜器件的性能对比分析表明：目前性能最佳的柔性器件采用的材料是（Bi，Sb）₂Te₃类合金，其单个热电偶对在1 K的温差下可输出0.1~0.3 mV的电压；在内阻足够低的条件下，单个热电偶对在1 K温差下的输出电压与热电材料的Seebeck系数相等；增加热电薄膜的厚度能够有效地降低热电偶对的内阻，进而提高器件的输出电压。

关键词: 柔性, 热电, 薄膜, 器件, 输出电压

Abstract:

The recent research progress of flexible thin-film thermoelectric devices is presented from the following aspects: the choice of the flexible substrates, the types of thermoelectric materials, the deposition process of thermoelectric thin films, the introduction of buffer layer, and the design of devices. At the same time, the major aspects in selection of thermoelectric materials and deposition process of thin films have been summarized. By comparison among the performances of reported thermoelectric devices, the flexible thin-film thermoelectric devices with alloy of (Bi,Sb)₂Te₃ show the best performance and the output voltage of single thermocouple can reach 0.1-0.3 mV with the temperature difference of 1 K, which nearly equals to the Seebeck coefficient of thermoelectric materials on the condition of sufficiently low internal resistance. Increasing the thickness of thermoelectric thin film can reduce the internal resistance of thermocouple effectively, and therefore improve the output voltage of flexible thin-film thermoelectric devices.

Key words: flexible, thermoelectric, thin films, devices, output voltage

中图分类号:

V45
TB34

邓元, 张义政, 王瑶, 高洪利. 柔性热电薄膜器件的研究进展[J]. 航空学报, 2014, 35(10): 2733-2746.

DENG Yuan, ZHANG Yizheng, WANG Yao, GAO Hongli. Research Progress on the Flexible Thin-film Thermoelectric Devices[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2014, 35(10): 2733-2746.

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柔性热电薄膜器件的研究进展

Research Progress on the Flexible Thin-film Thermoelectric Devices

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