关键词: 薄膜, 热物性参数, 导热系数, 发射率, 测量技术

Abstract:

The heat transferring performance of thin films governs the heat transfer characteristics, performance and reliability of the microelectronic devices in which they are used. Measurements of thermal properties of these thin films and further studies on their influence factors can provide the scientific basis for the design and development of microelectronic circuits. This paper reviews the state of the art of measurements and studies on thermal conductivity of thin films. Based on the fact that a new experimental method is presented which allows to measure the thermal conductivity and the emissivity of substrate foils simultaneously. Through founding the heat transfer mathematical models for the test samples of substrate foils and making analytical derivation, the feasibility of this method is demonstrated. The same properties can also be determined for extreme thin films deposited on the substrate foils. Furthermore, the influence of substrate foils on the whole heat transport effects can preferably be separated and the certainty of measurement can also be increased.

Key words: thin film, t hermal pr oper ty, therm al co nduct ivity, emissiv ity, measuring metho d