关键词: 薄膜, 电阻-应力特性, 温度系数

Abstract: Displaying a good linearity between the resistance and the stress, the amorphous Fe-Cr-Al/Si thin film is promising to be used as a transducer. Here the dependence of gauge factor, the temperature coefficient of resistance, the resistivity on sheet resistance and the thickness of the films are reported. Heat treatments of the samples are investigated. The crystalization temperature of the films is estimated by the drastic change in resistance during heating. Based on thess experimental results, an evaluation about the usefulness of the films for force transducer is made.

Key words: thin film, resistivity-strain characteristics, temperature coefficient of resistivity