Abstract:

Focusing on a tuning fork vibratory gyroscope fabricated through silicon bulk micromachining, the matrix perturbation technology in the random finite element method is first introduced to analyses the statistical characteristics of the natural frequencies of tuning fork vibratory gyroscope. The influences of random material parameters and dimensional parameters on the natural frequencies of a microgyroscope are quantitatively de-scribed by a so-called impact factor based on the probability theory.

Key words: micromachined , gyroscope,  , impact , factor,  , random , parameters,  , natural , frequencies,  , coefficient , of , dispersion,  , perturbation , method