关键词: 类金刚石薄膜, 真空电弧沉积, 扫描电镜, 原子力显微镜, 喇曼光谱

Abstract:

Diamond like carbon films are successfully obtained on silicon and high speed steel substrates by using a self developed device of filtered vacuum arc deposition.The films are analyzed with SEM, AFM, Raman spectrum and wear test.The substrate affects greatly the film quality, and a change in the bias voltage applied across the substrate can result in a remarked change in μ D, μ G, σ D, and σ G of the film's Raman spectrum.

Key words: diamond-like carbon, vacuum arc depo sit ion, SEM, A FM, Raman spect rum