关键词: 微机电系统, 微型致动器, 气泡, 主动流动控制

Abstract:

A micro balloon actuator array specially used for active flow control is developed for the first time in China with microelectro mechanical systems (MEMS) technology. The operation approach of active flow control with the micro balloon actuators is described. And the structure and novel fabrication method of the actuator are presented. Loadactuation deformation behavior of the actuator is characterized, which shows that this kind of actuator possesses a high load limitation and nearly linear relationship between load and actuation deformation.

Key words: MEMS,  , micro-actuator,  , balloon,  , active , flow , control