关键词: 金刚石微颗粒, 螺旋切入, 磨削, 微加工, 硬脆性材料

Abstract:

For establishing the basic technology of micro manufacture with diamond grains on hard and brittle materials, this paper studied the optimization condition of the ultra small scale grinding with diamond electric plating tool through analyzing the kinematics and mechanics model of the helical feed drilling mechanical grinding method. Following the analyzes, the author successfully realized the high precision micro manufacture with the diamond electric plating tool and the helical feed drilling mechanical grinding method on glasses, silicon and so on.

Key words: diamo nd gr ain, helical-feed dr illing metho d, g rinding, ultr a-small scale manufacture, har d andbrittle materials