致密非晶SiCN低压热稳定性及高温导电行为

doi:10.7527/S1000-6893.2022.27732

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致密非晶SiCN低压热稳定性及高温导电行为

牛家宏¹, 贾浩楠¹, 易法军², 彭祖军³, 陈伟¹()

^1.四川大学空天科学与工程学院，成都 610207
^2.哈尔滨工业大学特种环境复合材料技术国防科技重点实验室，哈尔滨 150001
^3.浙江清华柔性电子技术研究院，嘉兴 314006

收稿日期:2022-06-30 修回日期:2022-07-27 接受日期:2022-08-17 出版日期:2022-12-25 发布日期:2022-08-31
通讯作者: 陈伟 E-mail:chenwei2017@scu.edu.cn
基金资助:
中央高校基本科研业务费(YJ202164);四川省自然科学基金(2022NSFSC0294);国家自然科学基金(12002312)

Low-pressure thermal stability and high-temperature electrical conductivity of dense amorphous SiCN

Jiahong NIU¹, Haonan JIA¹, Fajun YI², Zujun PENG³, Wei CHEN¹()

^1.School of Aeronautics and Astronautics，Sichuan University，Chengdu 610207，China
^2.Science and Technology on Advanced Composites in Special Environment Laboratory，Harbin Institute of Technology，Harbin 150001，China
^3.Institute of Flexible Electronics Technology of Tsinghua，Zhejiang，Jiaxing 314006，China

Received:2022-06-30 Revised:2022-07-27 Accepted:2022-08-17 Online:2022-12-25 Published:2022-08-31
Contact: Wei CHEN E-mail:chenwei2017@scu.edu.cn
Supported by:
Chinese Fundamental Research Funds for Central Universities(YJ202164);Natural Science Foundation of Sichuan Province(2022NSFSC0294);National Natural Science Foundation of China(12002312)

摘要/Abstract

摘要：

准确量化高超声速飞行器高温热端部件的气动加热量是开展热防护系统设计、提高热端部件可靠性的关键。通过开展致密非晶SiCN在低压环境下的热稳定性及高温导电行为研究探讨了将非晶SiCN应用于高超声速飞行器传感领域的可行性。结果表明致密非晶SiCN在低压环境下表现出更低的高温稳定性及抗结晶能力，即在1 300 ℃发生较明显的结晶及热分解，温度较常压高温处理非晶SiCN低约200 ℃；低压环境促进自由碳的有序化转变，导致1 000 ℃低压高温处理非晶SiCN的电阻较常压高温处理非晶SiCN低约4个数量级，表现出更低的温度敏感性。总之非晶SiCN在低压环境下仍能保持优异的温度感知能力，但使用温度有所下降，降低约200 ℃。

关键词: 高温传感, SiCN, 低压, 高温稳定性, 高温导电, 微结构演变

Abstract:

Accurately quantifying the aerodynamic heating of high-temperature components of a hypersonic vehicle help develop the thermal protection system design and improve the reliability of the high-temperature components. In this paper， the feasibility about high temperature sensing of amorphous SiCN in the hypersonic aircraft field is discussed by studying the thermal stability and high-temperature electrical conductivity of dense amorphous SiCN under low pressure environment. The results show that the dense amorphous SiCN exhibits lower high temperature stability and anti-crystallization ability under low pressure environment.The visible crystallization and thermal decomposition occur at 1 300 ℃， which is about 200 ℃ lower than that of amorphous SiCN treated at normal pressure. The low pressure promotes the ordering transformation of free carbon. The resistance of amorphous SiCN treated at low pressure and 1 000 ℃ is about 4 orders of magnitude lower than that of amorphous SiCN treated at normal pressure， showing lower temperature sensitivity. In conclusion， amorphous SiCN still maintains excellent temperature sensing ability under low pressure environment， but the operating temperature has dropped by about 200 ℃.

Key words: high temperature sensing, SiCN, low pressure, high temperature stability, high temperature conductivity, microstructure evolution

中图分类号:

V254.2

牛家宏, 贾浩楠, 易法军, 彭祖军, 陈伟. 致密非晶SiCN低压热稳定性及高温导电行为[J]. 航空学报, 2022, 43(S2): 152-159.

Jiahong NIU, Haonan JIA, Fajun YI, Zujun PENG, Wei CHEN. Low-pressure thermal stability and high-temperature electrical conductivity of dense amorphous SiCN[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2022, 43(S2): 152-159.

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致密非晶SiCN低压热稳定性及高温导电行为

Low-pressure thermal stability and high-temperature electrical conductivity of dense amorphous SiCN

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