致密非晶SiCN低压热稳定性及高温导电行为
牛家宏, 贾浩楠, 易法军, 彭祖军, 陈伟
Low-pressure thermal stability and high-temperature electrical conductivity of dense amorphous SiCN
Jiahong NIU, Haonan JIA, Fajun YI, Zujun PENG, Wei CHEN
航空学报
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2022, (S2): 152
-159
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DOI: 10.7527/S1000-6893.2022.27732
CJA