高回转精度微柱状电极电化学加工模型及试验

doi:10.7527/S1000-6893.2016.0110

Abstract

Abstract:

To fabricate cylindrical micro electrode with high rotation accuracy efficiently and precisely on line, the process of electrochemical etching micro electrodes is investigated and improved deeply. First, the effect of rotation on the process of fabricating cylindrical electrode is analyzed based on the mechanism of electrochemical etching. It is proved that electrode rotation can improve the rotation accuracy of electrode by experiments. Second, according to the experimental results, the functional relationships among the applied voltage, immersed depth and rotation speed are established, and the mathematical model of controlling how to fabricate cylindrical electrode is built. Finally, the optimized combination of parameters is chosen under the direction of the model, and series of cylindrical micro electrodes with high rotation accuracy are fabricated with the diameter about 100 μm and the error of rotation accuracy controlled below 1 μm.

Key words: high rotation accuracy, cylindrical micro electrode, electrochemical etching, rotation of electrode, mathematical model

CLC Number:

V261.5
TG662

LI Minghong, LIU Yong, GUO Chunsheng, WANG Mingyu, NIU Jingran. Model and experimental on fabrication of cylindrical micro electrode with high rotation accuracy by electrochemical machining[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2016, 37(12): 3864-3872.

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Model and experimental on fabrication of cylindrical micro electrode with high rotation accuracy by electrochemical machining

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