航天器用薄膜温度传感器的研制及性能研究

doi:10.7527/S1000-6893.2020.24097

材料工程与机械制造

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航天器用薄膜温度传感器的研制及性能研究

崔云先¹, 高富来¹, 朱熙², 苏新明², 殷俊伟¹

1. 大连交通大学机械工程学院, 大连 116028;
2. 北京卫星环境工程研究所, 北京 100094

收稿日期:2020-04-16 修回日期:2020-04-21 发布日期:2020-05-28
通讯作者: 殷俊伟 E-mail:yjwzx@djtu.edu.cn
基金资助:
国家自然科学基金（51905071，51575074）；辽宁省自然科学基金（2019-BS-043）

Thin film temperature sensor for spacecraft: development and performance

CUI Yunxian¹, GAO Fulai¹, ZHU Xi², SU Xinming², YIN Junwei¹

1. School of Mechanical Engineering, Dalian Jiaotong University, Dalian 116028, China;
2. Beijing Institute of Spacecraft Environment Engineering, Beijing 100094, China

Received:2020-04-16 Revised:2020-04-21 Published:2020-05-28
Supported by:
National Natural Science Foundation of China (51905071, 51575074); Natural Science Foundation of Liaoning Province (2019-BS-043)

摘要/Abstract

摘要： 飞行器以高超声速飞行时瞬间温升可达1 600℃以上，为了保证飞行器的可靠和运行安全，准确实时测量热防护系统表面温度显得尤为重要。针对高温环境实时测温的技术难题，结合磁控溅射技术和陶瓷烧结技术，提出了一种引线和传感器基底一体化的微小型高温薄膜温度传感器结构。采用高温检定炉对传感器陶瓷基底的高温绝缘性进行了测试，并使用多种微观形貌表征方法对传感器主要结构材料进行筛选，得到薄膜温度传感器制备所需的最佳材料组合。进行了薄膜温度传感器静态标定和综合性能高温考核试验，结果表明，所研制传感器灵敏度、重复性的变化与标准热电偶基本保持一致，在实际环境温度低于1 500℃时，传感器测量误差不超过4‰，可在1 200℃高温环境中连续准确测温6 h以上，且测温上限高达1 800℃，验证了该传感器在高温环境中进行测温的可行性和实用性，为航天器表面温度测量和热防护系统优化提供科学依据。

关键词: 薄膜热电偶, 温度传感器, 磁控溅射, 陶瓷烧结, 静态标定, 高温考核

Abstract: At hypersonic speeds, the instantaneous temperature of spacecraft can reach higher than 1 600 ℃. To ensure the reliability and safety of the aircraft, it is critical to accurately measure the surface temperature of the thermal protection system in real time. In view of the technical problems of real-time temperature measurement in high temperature environments, and combining magnetron sputtering technology and ceramic sintering technology, this paper proposes a small thin film temperature sensor structure which integrates the lead wire and the sensor substrate. High temperature insulation of the ceramic insulating substrate of the sensor is tested by high temperature verification furnace. The main structural materials of the sensor are screened by various microscopic morphology characterization methods to obtain the best material combination needed for the preparation of the thin film temperature sensor. The static calibration and comprehensive performance test of the thin film temperature sensor at high temperature are conducted. The results show that the sensitivity and repeatability of the sensor are basically consistent with the standard thermocouple, with the high temperature measurement error no larger than 4‰ when the actual ambient temperature is lower than 1 500 ℃. Additionally, it can continuously and accurately measure temperature for more than 6 h at 1 200 ℃, and the upper limit of the temperature measurement is up to 1 800 ℃, verifying the feasibility and practicability of the sensor in measuring the surface temperature in high temperature environments, thereby providing scientific basis for spacecraft surface temperature measurement and thermal protection system optimization.

Key words: thin film thermocouple, temperature sensors, magnetron sputtering, ceramic sintering, static calibration, high temperature assessment

中图分类号:

V467
TH811

崔云先, 高富来, 朱熙, 苏新明, 殷俊伟. 航天器用薄膜温度传感器的研制及性能研究[J]. 航空学报, 2020, 41(12): 424097-424097.

CUI Yunxian, GAO Fulai, ZHU Xi, SU Xinming, YIN Junwei. Thin film temperature sensor for spacecraft: development and performance[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2020, 41(12): 424097-424097.

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航天器用薄膜温度传感器的研制及性能研究

Thin film temperature sensor for spacecraft: development and performance

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