临界反应距离法微细电化学高效加工大长径比微电极

doi:10.7527/S1000-6893.2021.25339

Abstract

Abstract: A micro Electrical Chemical Machining (μ-ECM) method based on critical gap control for efficient fabricating micro electrodes with large aspect ratio was proposed. Using strong alkaline electrolyte and microsecond power supply, the micron level precise removal of tungsten electrode can be controlled. The micro process of material removal in μ-ECM was analyzed. The process parameters for precise control of material removal based on critical gap have been determined by simulating the gap current density of different gap distance. The mathematical model of electrode material removal process was established, and the material removal law was obtained. The effects of gap voltage, pulse width and electrolyte concentration on the removal rate of micro electrode materials were studied. As a result, a micro electrode with diameter of 10 μm and aspect ratio of more than 200 was obtained by using the optimized process parameters. The maximum material removal rate can reach 2.7×10^-2 mm³/min, which is an order of magnitude higher than the current other methods.

Key words: critical reaction gap, μ-ECM, micro electrode, large aspect ratio, efficient fabrication

CLC Number:

V216.5/TG662

PENG Zilong, LIU Cong, LI Yinan, LAN Hongbo. Micro electrical chemical machining for efficient fabricating large aspect ratio micro electrodes by critical gap method[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2022, 43(4): 525339-525339.

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Micro electrical chemical machining for efficient fabricating large aspect ratio micro electrodes by critical gap method

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