Abstract: A new technique utilizing a high power-density pulsed plasma beam for modification of material surfaces is presented. The power density of the pulshed plasma beam ranges (1~40)×104w/cm2, the kinetic energy 1~5 KeV, the deposition energy 1~25 J/cm2, and the pulsed duration is about 60us. The post-treatment samples analyzed by suing the Auger electron spectroscopy, scanning electron microscopy, X-ray diffractometer, and Vicker's microhardness tester. Itis found that the concentration of the injected particles possesses a Gaussian distribution The thermal Zone induced by fast heating-cooling process forms a white-bright layer, indicating that there are new carbide and nitride produced in the surface layer, and thus the microhardness of the surface is increased.

Key words: material surface modification, fast quench, plasma application