溅射-电镀微成型制造柔性热膜传感器阵列
马炳和, 傅博, 李建强, 邓进军, 董拴成
Flexible Hot-film Sensor Array Fabricated with Sputtering-electroplating Micromachining
MA Binghe, FU Bo, LI Jianqiang, DENG Jinjun, DONG Shuancheng
航空学报
.
2011, (11): 2147
-2152
.
DOI: CNKI:11-1929/V.20110712.0904.001
CJA