航空学报 > 2003, Vol. 24 Issue (5): 466-470

基于组件网络方法的微加速度计建模与仿真

霍鹏飞, 马炳和, 苑伟政   

  1. 西北工业大学微纳米系统实验室 陕西西安 710072
  • 收稿日期:2003-06-04 修回日期:2003-07-21 出版日期:2003-10-25 发布日期:2003-10-25

Modeling and Simulation of Micromachined Accelerometer Using Multi-Port-Element Network Method

HUO Peng-fei, MA Bing-he, YUAN Wei-zheng   

  1. MEMS/NEMS Lab.; Northwestern Polytechnical University; Xi'an 710072; China
  • Received:2003-06-04 Revised:2003-07-21 Online:2003-10-25 Published:2003-10-25

摘要: 提出多端口组件网络方法对MEMS 进行建模与仿真, 建立了惯导MEMS 典型功能结构部件的参数化多端口组件模型, 联结组件模型形成网络构建了蟹腿式微加速度计的系统模型。用硬件描述语言作为编码工具, Saber 作为平台对该微加速度计模型进行了仿真分析。研究表明, 采用多端口组件网络可以实现M EMS 整体行为的快速仿真, 并能分析局部尺寸参数对系统性能的影响。与有限元分析相比较, 微加速度计系统模型仿真得到的检测方向的固有频率误差小于1.0%; 仿真结果表明梁的宽度变化对系统灵敏度有较大影响, 故需要尽量减小梁宽的加工误差。借助该模型还研究了系统对正弦及脉冲输入信号的响应特性。

关键词: 传感器技术, 系统级设计, 多端口组件网络, 微加速度计, 建模与仿真

Abstract: A method for modeling and simulation of MEMS based o n multiport-element network is presented. Witht his met hod, the functional compo nents of iner tial MEMS are modeled as multipor t-elements and a crab-leg accelerometer is represented as a network composed o f these models. All the models are coded in analogy hardw ar e description language of MAST and simulated on t he Saber simulator. With this approach the system behav ior can ber apidly analyzed and the influence of its parameters on system performance can be evaluated. Simulation of modalfrequency of the crab-leg accelerometer model ag rees to that of the finite element analysis( wit hin 1.0%) . Simulation results indicate that the system sensitivity is seriously influenced by t he w idth of the crab-leg beam, so the fabrication error of t he beam width should be reduced as much as possible. The system responses to sinusoidal and pulseinput sig nals are also investig ated.

Key words: transducer technology, system level design, multi-port-element network, micromachined accelerometer, modeling and simulation

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