关键词: 耐磨镀层, 固体薄膜, 物理气相沉积

Abstract: The hot hollow cathode ion-plated Ti(N, C) films on 1Crl8Ni9Ti stainless steel have been studied in order to increase the wear-resistance of aerospace and other mechanical parts.The effects of chemical compositions of films on wear-resistance, adhesion strength and microhardness were tested. Chemical compositions of the films were investigated by surface analysis instrument. Meanwhile, wear-resistance, adhesion strength and microhardness of the films were measured with wear testing machine, scratch tester and microhardness tester.The experimental results show,1. Whatever the contents of nitrogen and carbon varied, the sum of them was(50± 3) at.%.2. The mocrohardness values of Ti (N, C) films were much higher than TiN films, and lower than TiC films. They were from HK0.525000 to 40000 MPa.3. The friction coefficient values of Ti (N, C) films were very low, the average of them was about 0.037.It was confirmed that Ti(N, C)films were superior to TiN or TiC films on wear-resistance and adhesion strength, and a new way was developed for improving the wear-resistance of stainless steel parts.

Key words: wear-resistance coatings, thin solid films, physical vapour deposition