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OPTIMIZATION OF THE BOUNDARY STRUCTURAL PARAMETERS OF A SILICON RESONANT BEAM PRESSURE MICROSENSOR
FAN Shang chun;LI Ming ming;SONG Zhi sheng
ACTA AERONAUTICAET ASTRONAUTICA SINICA . 1999, (4): 75 -77 . 

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All copyright © editorial office of Chinese Journal of Aeronautics

Total visits: 6658907 Today visits: 1341