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THERMAL EXCITED SILICON MICROSTRUCTURE RESONATOR PRESSURE SENSOR
FAN Shang-chun;LIU- Guang-yu
ACTA AERONAUTICAET ASTRONAUTICA SINICA . 2000, (5): 474 -476 . 

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All copyright © editorial office of Chinese Journal of Aeronautics

Total visits: 6658907 Today visits: 1341