Carbon Fiber-Reinforced Plastics (CFRP) composites have a huge difference in the properties of resin matrix and fiber reinforced phase, and its application in the aerospace field is restricted by the existing processing technologies. Therefore, the water jet-guided laser technology which has the advantages of small thermal damage and strong processing depth shows superior capabilities in the field of special processing. Based on the "element birth and death" technique in the finite element method, this paper establishes the three-dimensional model for transient temperature field of heterogeneous fiber matrix. Using this model, the micro-topography of the cross-section was simulated and experimentally studied by bidirectional cyclic scanning. Research shows that the strong convective heat transfer effect of the water jet on the material during water jet-guided laser processing is significant, which allows the material removal rate and chip removal rate remain at a high level. During deep groove processing, rupture occurred on the surface layer of carbon fiber with 90°, which becomes the main source of section damage. Analysis of the surface morphology of different surfaces and depths of the cross-section shows that the efficient chip removal rate of the water jet is the key factor for high-precision processing. As a result, changing the scanning depth-width ratio can effectively reduce the fiber damage in the deep groove, and can obtain smaller roughness and taper in the cross-section. When the scanning aspect ratio was reduced by half, the damaged area was reduced by 46%.
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