Abstract:

The principles of flexible actuation are offered and a mechanical model of the flexible micro actuator is established. A prototype of ER flexible micro actuator is designed based on the damping valve effect of ERF. By analysis of the actuator motion process of the FMA,a simulation of the actuating process in three dimensions of the FMA is formed.Then, some kinematic and dynamic parameters of the ER flexible actuating process, such as displacement, velocity and acceleration, are analysed.

Key words: electror heological fluids, flexible micro-actuators, micro-electro-mechanical system