微细电解线切割是一种新型的微细加工技术,适合高精度金属窄缝、窄槽等微细结构的加工,由于加工间隙内电解产物排出困难,容易影响加工精度。为了提高产物排出效率,提出线电极微幅往复走丝促进加工间隙内电解产物排出的方法,改善了加工稳定性,提高了加工精度和加工效率。建立了间隙内电解产物排出效率对加工精度、加工速度影响的数学模型,分析了线电极走丝速度和走丝幅值对间隙内电解产物排出和电解液更新的影响。通过试验研究了线电极的走丝速度和走丝幅值对加工精度和加工效率的影响规律,采用优化参数在厚度为80 μm的钴基弹性合金上进行微槽结构加工,底面粗糙度约为0.45 μm,倒角半径小于8 μm。结果表明线电极轴向微幅往复走丝可以有效地提高加工质量和加工效率。
Products of electrolysis in the inter-electrode gap is one of the major factors influencing wire electrode micro-electrochemical machining precision. To enhance the efficiency of removing these products, a new method is proposed that allows the wire electrode to perform micro-amplitude reciprocating movement in the axial direction during the processing. The machining stability and accuracy can thus be improved and the machining efficiency is increased. A mathematical model is built to investigate the influence of the wire electrode travelling speed and micro-amplitude on removing the product and refreshing the electrolyte. Their effects of the electrode travelling speed and micro-amplitude on the machining accuracy and efficiency are investigated experimentally. A micro groove on an alloy is generated with the optimized parameters with a resulting surface roughness of about 0.45 μm and radius of chamfer is lesser than 8 μm。
[1] Wang J. The developing trend of micro-processing technology at home and aboard. Manufacturing Technology & Machine Tool, 2009(7): 33-36. (in Chinese) 王军. 微细加工技术在国内外发展趋势的研究. 制造技术与机床, 2009(7): 33-36.
[2] Liang J Q, Yao J S. The study of LIGA technology. Optics and Precision Engineering, 2000, 8(1): 38-41. (in Chinese) 梁静秋, 姚劲松. LIGA技术基础研究. 光学精密工程, 2000, 8(1): 38-41.
[3] Liu X, Chen T, Liu S B, et al. Research on application of femtosecond laser in microprocessing of alloy. Microfabrication Technology, 2007(5): 14-17. (in Chinese) 刘勋, 陈涛, 刘世炳, 等. 飞秒激光应用于合金材料微细加工的试验研究. 微细加工技术, 2007(5): 14-17.
[4] Li W Z, Liu J G, Yu Y X. Key technologies of micro EDM machine tools. Chinese Journal of Mechanical Engineering, 2007, 43(1): 170-175. (in Chinese) 李文卓, 刘加光, 于云霞. 微细电火花加工机床关键技术. 机械工程学报, 2007, 43(1): 170-175.
[5] Cao Z Y, He N, Li L. Micro-cutting technology. Microfabrication Technology, 2006(3): 1-5. (in Chinese) 曹自洋, 何宁, 李亮. 微细切削加工技术. 微细加工技术, 2006(3): 1-5.
[6] Zhu D, Wang M H, Ming P M, et al. Micro electrochemical fabrication. Nanotechnology and Precision Engineering, 2005, 3 (2): 151-155. (in Chinese) 朱荻, 王明环, 明平美, 等. 微细电化学加工技术. 纳米技术与精密工程, 2005, 3(2): 151-155.
[7] Fan Z W, Hourng L W, Wang C Y. Fabrication of tungsten microelectrodes using pulsed electrochemical machining. Precision Engineering, 2010, 34(3): 489-496.
[8] Liu Y, Zhu D, Zeng Y B, et al. Experimental investigation on complex structures machining by electrochemical micromachining technology. Chinese Journal of Aeronautics, 2010, 23(5):578-584.
[9] Zhu D, Wang K, Qu N S. Micro wire electrochemical cutting by using in situ fabricated wire electrode. CIRP Annals-Manufacturing Technology, 2007, 56(1): 241-244.
[10] Na C W, Kim B H, Shin H S, et al. Micro wire electrochemical machining. Proceedings of the 15th International Symposium on Electromachining. 2007.
[11] Wang S H, Zhu D. Micro wire electrode electrochemical machining. Acta Aeronautica et Astronautica Sinica, 2009, 30(9): 1788-1794. (in Chinese) 王少华, 朱荻. 微尺度线电极电解加工. 航空学报, 2009, 30(9): 1788-1794.
[12] Wang K, Zhu D, Wang M H. Fabrication of micrometer scale wire electrodes using eletrochemical etching. Mechanical Science and Technology, 2006, 25(9): 1073-1075.(in Chinese) 王昆, 朱荻, 王明环. 微米尺度线电极的电化学腐蚀法制备. 机械科学与技术, 2006, 25(9): 1073-1075.
[13] Wang M H, Zhu D, Xu H Y. Use of micro-helix electrodes in improving performance of micro-ECM. Mechanical Science and Technology, 2006, 25(3): 348-351. (in Chinese) 王明环, 朱荻, 徐惠宇. 微螺旋电极在改善微细电解加工性能中的应用. 机械科学与技术, 2006, 25(3): 348-351.
[14] Li X H, Wang Z L, Zhao W S. The electrochemical micromachining based on multifunction tool for micromachining. Journal of Shanghai JiaoTong University, 2006, 40(6): 909-913. (in Chinese) 李小海, 王振龙, 赵万生. 基于多功能加工平台的微细电解加工工艺. 上海交通大学学报, 2006, 40(6): 909-913.
[15] Bhattacharyya B, Munda J. Experimental investigation on the influence of electrochemical machining parameters on machining rate and accuracy in micromachining domain. Machine Tools & Manufacture, 2003, 43: 1301-1310.
[16] Wang S H, Zhu D, Zeng Y B, et al. Micro wire electrode electrochemical cutting with low frequency and small amplitude tool vibration. The International Journal of Advanced Manufacturing Technolog, 2011, 53(5-8): 535-544.
[17] Wang J Y, Xu J W. Principle and application of electrochemical machining. Beijing: National Defense Industry Press, 2001. (in Chinese) 王建业, 徐家文. 电解加工原理及应用. 北京:国防工业出版社, 2001.
[18] Wen S M. Theory and application of micro-fluid boundary layer. Beijing: Metallurgical Industry Press, 2002. (in Chinese) 文书明. 微流边界层理论及其应用. 北京: 冶金工业出版社, 2002.
[19] Wang K. Fundamental research on micro electrochemical wire cutting. Nanjing: College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, 2007. (in Chinese) 王昆. 微细电解线切割加工技术的基础研究. 南京: 南京航空航天大学机电学院, 2007.
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