航空学报 > 2011, Vol. 32 Issue (9): 1755-1760   doi: CNKI:11-1929/V.20110225.1654.001

压电式微型合成射流器结构参数优化设计

沈丹东, 马炳和, 邓进军, 苑伟政   

  1. 西北工业大学 陕西省微/纳米系统重点实验室, 陕西 西安 710072
  • 收稿日期:2010-12-10 修回日期:2011-01-07 出版日期:2011-09-25 发布日期:2011-09-16
  • 通讯作者: 马炳和(1972-) 男,博士,教授。主要研究方向:MEMS设计与建模、航空应用微系统。 Tel: 029-88492847 E-mail: mabh@nwpu.edu.cn E-mail:mabh@nwpu.edu.cn
  • 作者简介:沈丹东(1985-) 男,硕士研究生。主要研究方向:MEMS致动器技术。 Tel: 029-88490353-8070 E-mail: dandongshen@126.com
  • 基金资助:

    国家自然科学基金 (50775188);上海交通大学机械系统与振动国家重点实验室开放基金

Structural Parameters Optimization of Piezoelectric Micro Synthetic Jet Actuators

SHEN Dandong, MA Binghe, DENG Jinjun, YUAN Weizheng   

  1. Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi'an 710072, China
  • Received:2010-12-10 Revised:2011-01-07 Online:2011-09-25 Published:2011-09-16

摘要: 压电式微型合成射流器的结构参数对射流速度有极大影响,然而各结构参数的影响规律及程度无法用单因素考查法来确定。针对这个问题,采用正交分析法结合多域耦合数值模拟,研究了主要结构参数对射流速度的综合影响,对器件结构参数进行了优化。仿真结果表明:在所考查的参数范围内,喷口宽度、腔体宽度、压电片厚度对射流速度的影响较大,但三者的影响程度依次降低;射流速度随喷口宽度、压电片厚度的增大而减小,随腔体宽度的增大而增大;压电片宽度对射流速度影响很小。在此基础上,采用微机电系统(MEMS)加工工艺制作了压电式微型合成射流器,测得器件能承受的最大激励电压为30 V,最大射流速度为10 m/s,最佳工作频率为10 kHz。

关键词: 微机电系统, 微型合成射流器, 正交分析法, 多域耦合数值模拟法, 结构参数优化

Abstract: The orthogonal method and multiple-domain coupling numerical simulation are used to explore the influence of structural parameters on piezoelectric micro synthetic jet velocity. As a precondition the orifice thickness, chamber height and diaphragm thickness are predefined for the sake of micromachining economy. The results show that the orifice width, chamber width and PbZrxTi1-xO3 (PZT) thickness affect the jet velocity seriously. In the range of the test, the jet velocity decreases with increasing orifice width and PZT thickness, or with decreasing chamber width. The PZT width has the least influence on the jet velocity. The research is valuable for structural design optimization of piezoelectric micro synthetic jet actuators. Finally, piezoelectric micro synthetic jet actuators are fabricated with Si micromachining technology based on the above study. Peak jet velocity of 10 m/s is obtained with 30 V and 10 kHz AC electric drive.

Key words: MEMS, micro synthetic jet actuator, orthogonal method, multi-domain coupling numerical simulation, structural parameter optimization

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