紫外纳秒脉冲激光烧蚀单晶硅表面特征创成机制
张全利, 储成龙, 翟健超, 王昱凯, 张振, 徐九华
Surface characteristics formation mechanism of ablated monocrystalline silicon by UV nanosecond pulsed laser
ZHANG Quanli, CHU Chenglong, ZHAI Jianchao, WANG Yukai, ZHANG Zhen, XU Jiuhua
航空学报
.
2022, (4): 525341
-525341
.
DOI: 10.7527/S1000-6893.2021.25341
CJA