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Surface characteristics formation mechanism of ablated monocrystalline silicon by UV nanosecond pulsed laser
ZHANG Quanli, CHU Chenglong, ZHAI Jianchao, WANG Yukai, ZHANG Zhen, XU Jiuhua
ACTA AERONAUTICAET ASTRONAUTICA SINICA . 2022, (
4
): 525341 -525341 . DOI: 10.7527/S1000-6893.2021.25341