Micro electrical chemical machining for efficient fabricating large aspect ratio micro electrodes by critical gap method

PENG Zilong; LIU Cong; LI Yinan; LAN Hongbo

doi:10.7527/S1000-6893.2021.25339

ACTA AERONAUTICAET ASTRONAUTICA SINICA >

2022 , Vol. 43 >Issue 4: 525339 - 525339

DOI: https://doi.org/10.7527/S1000-6893.2021.25339

Articles

Micro electrical chemical machining for efficient fabricating large aspect ratio micro electrodes by critical gap method

PENG Zilong ,
LIU Cong ,
LI Yinan ,
LAN Hongbo

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1. Shandong Engineering Research Center for Additive Manufacturing, Qingdao University of Technology, Qingdao 266520, China 2. Key Lab of Industrial Fluid Energy Conservation and Pollution Control, Ministry of Education, Qingdao University of Technology, Qingdao 266520, China

Received date: 2021-01-28

Revised date: 2021-03-01

Online published: 2021-06-29

Supported by

National Natural Science Foundation of China (51875300, 51871128); Major Project of Shandong Province Natural Science Foundation (ZR2020ZD04); Shandong Province Natural Science Foundation (ZR2017MEE012, ZR2018MEE017)

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Abstract

A micro Electrical Chemical Machining (μ-ECM) method based on critical gap control for efficient fabricating micro electrodes with large aspect ratio was proposed. Using strong alkaline electrolyte and microsecond power supply, the micron level precise removal of tungsten electrode can be controlled. The micro process of material removal in μ-ECM was analyzed. The process parameters for precise control of material removal based on critical gap have been determined by simulating the gap current density of different gap distance. The mathematical model of electrode material removal process was established, and the material removal law was obtained. The effects of gap voltage, pulse width and electrolyte concentration on the removal rate of micro electrode materials were studied. As a result, a micro electrode with diameter of 10 μm and aspect ratio of more than 200 was obtained by using the optimized process parameters. The maximum material removal rate can reach 2.7×10^-2 mm³/min, which is an order of magnitude higher than the current other methods.

Key words： critical reaction gap; μ-ECM; micro electrode; large aspect ratio; efficient fabrication

Cite this article

PENG Zilong , LIU Cong , LI Yinan , LAN Hongbo . Micro electrical chemical machining for efficient fabricating large aspect ratio micro electrodes by critical gap method[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2022 , 43(4) : 525339 -525339 . DOI: 10.7527/S1000-6893.2021.25339

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