ACTA AERONAUTICAET ASTRONAUTICA SINICA >
Model and experimental on fabrication of cylindrical micro electrode with high rotation accuracy by electrochemical machining
Received date: 2016-02-25
Revised date: 2016-04-05
Online published: 2016-05-05
Supported by
National Natural Science Foundation of China (51305238); China Postdoctoral Science Foundation (2015M572023); Natural Science Foundation of Shandong Province (ZR2015PE016); Young Scholars Program of Shandong University, Weihai (2015WHWLJH03)
To fabricate cylindrical micro electrode with high rotation accuracy efficiently and precisely on line, the process of electrochemical etching micro electrodes is investigated and improved deeply. First, the effect of rotation on the process of fabricating cylindrical electrode is analyzed based on the mechanism of electrochemical etching. It is proved that electrode rotation can improve the rotation accuracy of electrode by experiments. Second, according to the experimental results, the functional relationships among the applied voltage, immersed depth and rotation speed are established, and the mathematical model of controlling how to fabricate cylindrical electrode is built. Finally, the optimized combination of parameters is chosen under the direction of the model, and series of cylindrical micro electrodes with high rotation accuracy are fabricated with the diameter about 100 μm and the error of rotation accuracy controlled below 1 μm.
LI Minghong , LIU Yong , GUO Chunsheng , WANG Mingyu , NIU Jingran . Model and experimental on fabrication of cylindrical micro electrode with high rotation accuracy by electrochemical machining[J]. ACTA AERONAUTICAET ASTRONAUTICA SINICA, 2016 , 37(12) : 3864 -3872 . DOI: 10.7527/S1000-6893.2016.0110
[1] 刘勇, 曾永彬, 余宏兵, 等. 多阶柱状微电极加工模型及试验研究[J]. 机械工程学报, 2011, 47(17):164-171. LIU Y, ZENG Y B, YU H B, et al. Theoretical and experimental research on fabrication of multiple stepped cylindrical micro electrode[J]. Journal of Mechanical Engineering, 2011, 47(17):164-171(in Chinese).
[2] YAMAGATA Y, HIGUCHI T. Three-dimensional micro fabrication by precision cutting technique[J]. Journal of the Japan Society for Precision Engineering, 1995, 61(10):1361-1364.
[3] WAIDA T, OKANO K. Micro-grinding of micro-machine component[J]. Journal of the Japan Society for Precision Engineering, 1995, 61(10):1365-1368.
[4] MASUZAWA T, FUGINO M, KOBAYASHI K, et al. Wire electro-discharge grinding for micro-machining[J]. CIRP Annals-Manufacturing Technology, 1985, 34(1):431-434.
[5] MASUZAWA T, TSUKAMOTO J, FUJINO M. Drilling of deep microholes by EDM[J]. CIRP Annals-Manufacturing Technology, 1989, 38(1):195-198.
[6] BRYANT P J, KIM H S, ZHENG Y C, et al. Technique for shaping scanning tunneling microscope tips[J]. Review of Scientific Instruments, 1987, 58(6):1115.
[7] FOTINO M. Nanotips by reverse electrochemical etching[J]. Applied Physics Letters, 1992, 60(23):2935-2937.
[8] LIM Y M, KIM S H. An electrochemical fabrication method for extremely thin cylindrical micropin[J]. International Journal of Machine Tools and Manufacture, 2001, 41(15):2287-2296.
[9] LIM Y M, LIM H J, LIU J R, et al. Fabrication of cylindrical micropins with various diameters using DC current density control[J]. Journal of Materials Processing Technology, 2003, 141(2):251-255.
[10] LIM H J, LIM Y M, KIM S H. Fabrication of arbitrarily shaped microelectrodes by electrochemical etching[J]. Japanese Journal of Applied Physics, 2003, 42(3):1479-1485.
[11] 赵万生, 李志勇, 王振龙, 等. 微三维结构电火花铣削关键技术研究[J]. 微细加工技术, 2003(3):49-55. ZHAO W S, LI Z Y, WANG Z L, et al. Research on key techniques of 3D micro-EDM milling[J]. Microfabrication Technology, 2003(3):49-55(in Chinese).
[12] 王明环, 朱荻, 徐惠宇. 电化学腐蚀法制备针尖的试验研究[J]. 传感器技术, 2005, 24(3):24-26. WANG M H, ZHU D, XU H Y. Experimental research on tips preparation using electrochemical etching[J]. Journal of Transducer Technology, 2005, 24(3):24-26(in Chinese).
[13] 王明环, 朱荻, 张朝阳. 电化学腐蚀法加工微圆柱体[J]. 机械工程学报, 2006, 42(6):128-132. WANG M H, ZHU D, ZHANG Z Y. Fabrication of micro-pin based on electrochemical etching[J]. Journal of Mechanical Engineering, 2006, 42(6):128-132(in Chinese).
[14] 王少华, 朱荻. 微尺度线电极电解加工[J]. 航空学报, 2009, 30(9):1788-1794. WANG S H, ZHU D. Micro wire electrode electrochemical machining[J]. Acta Aeronautica et Astronautica Sinica, 2009, 30(9):1788-1794(in Chinese).
[15] 刘勇, 朱荻, 曾永彬, 等. 微细电解铣削加工模型及实验研究[J]. 航空学报, 2010, 31(9):1864-1871. LIU Y, ZHU D, ZENG Y B, et al. Theoretical and experimental research on micro electrochemical milling[J]. Acta Aeronautica et Astronautica Sinica, 2010, 31(9):1864-1871(in Chinese).
[16] 王明环, 彭伟. 电化学加工法制备微细工具电极试验研究[J]. 兵工学报, 2010, 31(1):74-78. WANG M H, PENG W. Study on micro-electrodes by using electrochemical machining[J]. Acta Armamentarii, 2010, 31(1):74-78(in Chinese).
[17] FAN Z W, HOURNG L W. The analysis and investigation on the microelectrode fabrication by electrochemical machining[J]. International Journal of Machine Tools and Manufacture, 2009, 49(7):659-666.
[18] 王明环, 朱荻, 徐惠宇. 微螺旋电极在改善微细电解加工性能中的应用[J]. 机械科学与技术, 2006, 25(3):348-351. WANG M H, ZHU D, XU H Y. Use of micro-helix electrodes in improving performance of micro-ECM[J]. Mechanical Science and Technology, 2006, 25(3):348-351(in Chinese).
[19] 刘勇, 曾永彬.用高转速微电极电解钻削深小孔[J]. 光学精密工程, 2014, 22(3):608-615. LIU Y, ZENG Y B. Experimental research on electrochemical drilling of deep and small holes with high speed micro electrode[J]. Optics and Precision Engineering, 2014, 22(3):608-615(in Chinese).
[20] FANG X L, ZENG P F, ZENG Y B, et al. Enhancement of performance of wire electrochemical micromachining using a rotary helical electrode[J]. Journal of Materials Processing Technology, 2016, 227:129-137.
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